International Chemical Safety Cards SILANE ICSC: 0564 Monosilane Silicon tetrahydride Silicane SiH4 Molecular mass: 32.1 (cylinder) ICSC #    0564 CAS #     7803-62-5 RTECS # VV1400000 UN #        2203 April 07, 1997 Peer reviewed TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Extremely flammable. NO open flames, NO sparks, and NO smoking. Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out; in other cases extinguish with powder, carbon dioxide. EXPLOSION Gas/air mixtures are explosive. Closed system, ventilation, explosion-proof electrical equipment and lighting. Combat fire from a sheltered position. EXPOSURE STRICT HYGIENE!  •INHALATION Cough. Headache. Nausea. Sore throat. Ventilation, local exhaust, or breathing protection. Fresh air, rest. Refer for medical attention.  •SKIN Redness. ON CONTACT WITH LIQUID: FROSTBITE. Cold-insulating gloves. ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower.  •EYES Redness. Pain. Safety goggles, or eye protection in combination with breathing protection. First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.  •INGESTION SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Evacuate danger area! Consult an expert! Ventilation. Remove gas with fine water spray. (Extra personal protection: self-contained breathing apparatus). Fireproof. R: S: UN Hazard Class: 2.1 SEE IMPORTANT INFORMATION ON BACK ICSC: 0564 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities (C) IPCS CEC 1994. No modifications to the International version have been made except to add the OSHA PELs, NIOSH RELs and NIOSH IDLH values.

International Chemical Safety Cards SILANE ICSC: 0564 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS GAS , WITH CHARACTERISTIC ODOUR. PHYSICAL DANGERS: The gas is heavier than air. CHEMICAL DANGERS: The substance may spontaneously ignite on contact with air. The substance decomposes on heating or on burning producing silicon and hydrogen , causing fire and explosion hazard. The substance is a strong reducing agent and reacts with oxidants. Reacts slowly with water. Reacts with potassium hydroxide solution and halogens. OCCUPATIONAL EXPOSURE LIMITS: TLV (as TWA): 5 ppm; 6.6 mg/m3 (ACGIH 1996). OSHA PEL: none NIOSH REL: TWA 5 ppm (7 mg/m3) NIOSH IDLH: No data ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation. INHALATION RISK: A harmful concentration of this gas in the air will be reached very quickly on loss of containment. EFFECTS OF SHORT-TERM EXPOSURE: The substance irritates the eyes, the skin and the respiratory tract. Rapid evaporation of the liquid may cause frostbite. EFFECTS OF LONG-TERM OR REPEATED EXPOSURE: PHYSICAL PROPERTIES Boiling point: -112°C Melting point: -185°C Solubility in water: slow reaction Relative vapour density (air = 1): 1.3 Explosive limits, vol% in air: 1.37-100 ENVIRONMENTAL DATA N O T E S NFPA Code: H2; F4; R3; ADDITIONAL INFORMATION ICSC: 0564 SILANE (C) IPCS, CEC, 1994

IMPORTANT LEGAL NOTICE: Neither NIOSH, the CEC or the IPCS nor any person acting on behalf of NIOSH, the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use. The only modifications made to produce the U.S. version is inclusion of the OSHA PELs, NIOSH RELs and NIOSH IDLH values.