International Chemical Safety Cards NITROGEN TRIFLUORIDE ICSC: 1234 Nitrogen fluoride Trifluoroamine Trifluoroammonia Perfluoroammonia NF3 Molecular mass: 71.0 (cylinder) ICSC #    1234 CAS #     7783-54-2 RTECS # QX1925000 UN #        2451 October 27, 2004 Peer reviewed TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Not combustible but enhances combustion of other substances. Gives off irritating or toxic fumes (or gases) in a fire. Heating will cause rise in pressure with risk of bursting. NO contact with flammable substances. NO contact with reducing agents. In case of fire in the surroundings: use appropriate extinguishing media. EXPLOSION In case of fire: keep cylinder cool by spraying with water. EXPOSURE  •INHALATION Ventilation, local exhaust, or breathing protection. Fresh air, rest.  •SKIN Remove contaminated clothes.  •EYES Safety goggles. First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.  •INGESTION SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Ventilation. NEVER direct water jet on liquid. Personal protection: self-contained breathing apparatus. Fireproof if in building. Separated from combustible and reducing substances. Cool. R: S: UN Hazard Class: 2.2 UN Subsidiary Risks: 5.1 SEE IMPORTANT INFORMATION ON BACK ICSC: 1234 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities (C) IPCS CEC 1994. No modifications to the International version have been made except to add the OSHA PELs, NIOSH RELs and NIOSH IDLH values.

International Chemical Safety Cards NITROGEN TRIFLUORIDE ICSC: 1234 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS GAS , WITH CHARACTERISTIC ODOUR. PHYSICAL DANGERS: The gas is heavier than air and may accumulate in lowered spaces causing a deficiency of oxygen. CHEMICAL DANGERS: The substance decomposes on heating producing toxic fumes including fluoride. The substance is a strong oxidant and reacts with combustible and reducing materials. Reacts violently with ammonia, carbon monoxide, diborane, hydrogen, hydrogen sulfide, methane or tetrafluorohydrazine causing explosion hazard. Attacks metal. The substance is decomposed by electric sparks. OCCUPATIONAL EXPOSURE LIMITS: TLV: 10 ppm as TWA; BEI issued; (ACGIH 2004). MAK not established. OSHA PEL: TWA 10 ppm (29 mg/m3) NIOSH REL: TWA 10 ppm (29 mg/m3) NIOSH IDLH: 1000 ppm ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation. INHALATION RISK: On loss of containment, a harmful concentration of this gas in the air will be reached very quickly. EFFECTS OF SHORT-TERM EXPOSURE: EFFECTS OF LONG-TERM OR REPEATED EXPOSURE: The substance may have effects on the liver and kidneys. Repeated or prolonged inhalation exposure may cause fluorosis. PHYSICAL PROPERTIES Boiling point: -129°C Melting point: -208.5°C Relative density (water = 1): see Notes Solubility in water: none Relative density of the vapour/air-mixture at 20°C (air = 1): 2.45 ENVIRONMENTAL DATA N O T E S Density of the liquid at boiling point: 1.885 kg/l. The odour warning when the exposure limit value is exceeded is insufficient. Methemoglobinemia has been observed in animals, but relevance to humans is unclear. Turn leaking cylinder with the leak up to prevent escape of gas in liquid state. Wear protective equipment during this operation. Check oxygen content before entering area. High concentrations in the air cause a deficiency of oxygen with the risk of unconsciousness or death. Transport Emergency Card: TEC (R)-20G10 ADDITIONAL INFORMATION ICSC: 1234 NITROGEN TRIFLUORIDE (C) IPCS, CEC, 1994

IMPORTANT LEGAL NOTICE: Neither NIOSH, the CEC or the IPCS nor any person acting on behalf of NIOSH, the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use. The only modifications made to produce the U.S. version is inclusion of the OSHA PELs, NIOSH RELs and NIOSH IDLH values.