International Chemical Safety Cards TRICHLOROSILANE ICSC: 0591 Trichloromonosilane Silicochloroform Cl3HSi Molecular mass: 135.47 ICSC #    0591 CAS #     10025-78-2 RTECS # VV5950000 UN #        1295 EC #         014-001-00-9 March 05, 2002 Peer reviewed TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Extremely flammable. Gives off irritating or toxic fumes (or gases) in a fire. NO open flames, NO sparks, and NO smoking. NO water. AFFF, powder, carbon dioxide. EXPLOSION Vapour/air mixtures are explosive. Closed system, ventilation, explosion-proof electrical equipment and lighting. Do NOT use compressed air for filling, discharging, or handling. In case of fire: cool drums, etc., by spraying with water but avoid contact of the substance with water. EXPOSURE STRICT HYGIENE! IN ALL CASES CONSULT A DOCTOR!  •INHALATION Cough. Sore throat. Burning sensation. Laboured breathing. Shortness of breath. Symptoms may be delayed (see Notes). Ventilation, local exhaust, or breathing protection. Fresh air, rest. Half-upright position. Artificial respiration may be needed. Refer for medical attention. See Notes.  •SKIN Redness. Pain. Blisters. Skin burns. Protective gloves. Protective clothing. Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention.  •EYES Redness. Pain. Severe deep burns. Face shield, or eye protection in combination with breathing protection. First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.  •INGESTION Burning sensation. Abdominal pain. Shock or collapse. Do not eat, drink, or smoke during work. Rinse mouth. Do NOT induce vomiting. Give nothing to drink. Refer for medical attention. SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Evacuate danger area! Consult an expert! Ventilation. Collect leaking and spilled liquid in sealable containers as far as possible; do not use plastic containers. Absorb remaining liquid in dry sand or inert absorbent and remove to safe place. Do NOT wash away into sewer. (Extra personal protection: chemical protection suit including self-contained breathing apparatus.) Fireproof. Separated from food and feedstuffs and incompatible materials . See Chemical Dangers. Cool. Dry. Well closed. Ventilation along the floor. Do not transport with food and feedstuffs. F+ symbol C symbol R: 12-14-17-20/22-29-35 S: 2-7/9-16-26-36/37/39-43-45 UN Hazard Class: 4.3 UN Subsidiary Risks: 3 and 8 UN Packing Group: I SEE IMPORTANT INFORMATION ON BACK ICSC: 0591 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities (C) IPCS CEC 1994. No modifications to the International version have been made except to add the OSHA PELs, NIOSH RELs and NIOSH IDLH values.

International Chemical Safety Cards TRICHLOROSILANE ICSC: 0591 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS , VOLATILE, FUMING LIQUID , WITH PUNGENT ODOUR. PHYSICAL DANGERS: The vapour is heavier than air and may travel along the ground; distant ignition possible. CHEMICAL DANGERS: The substance decomposes on heating producing toxic and corrosive fumes including hydrogen chloride . Reacts violently with water , strong oxidants , strong acids , bases to produce hydrogen chloride (see ICSC0163) . Attacks many metals in presence of water. OCCUPATIONAL EXPOSURE LIMITS: TLV not established. ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation of its vapour and by ingestion. INHALATION RISK: No indication can be given about the rate in which a harmful concentration in the air is reached on evaporation of this substance at 20°C. EFFECTS OF SHORT-TERM EXPOSURE: The substance is corrosive to the eyes, the skin and the respiratory tract. Corrosive on ingestion. Inhalation of its vapour may cause lung oedema (see Notes). Inhalation of may cause asthma-like reactions. Exposure may result in death. Medical observation is indicated. See Notes. EFFECTS OF LONG-TERM OR REPEATED EXPOSURE: PHYSICAL PROPERTIES Boiling point: 31.8°C Melting point: -126.5°C Relative density (water = 1): 1.34 Solubility in water: reaction Vapour pressure, kPa at 20°C: 65.8 Relative vapour density (air = 1): 4.7 Relative density of the vapour/air-mixture at 20°C (air = 1): 3.3 Flash point: -27°C c.c. Auto-ignition temperature: 185°C Explosive limits, vol% in air: 1.2-90.5 ENVIRONMENTAL DATA N O T E S Reacts violently with fire extinguishing agents such as water. The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation are therefore essential. Immediate administration of an appropriate inhalation therapy by a doctor or a person authorized by him/her, should be considered. Toxicological properties are inferred from those of Methyldichlorosilane (ICSC 0297). Transport Emergency Card: TEC (R)-43S1295 NFPA Code: H3; F4; R2; W ADDITIONAL INFORMATION ICSC: 0591 TRICHLOROSILANE (C) IPCS, CEC, 1994

IMPORTANT LEGAL NOTICE: Neither NIOSH, the CEC or the IPCS nor any person acting on behalf of NIOSH, the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use. The only modifications made to produce the U.S. version is inclusion of the OSHA PELs, NIOSH RELs and NIOSH IDLH values.